Florida International University  |  College of Engineering and Computing
Grover Larkins, Ph.D. FAST Director
Air Force Office of Scientific Research
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Chemical Room | Patterning Laboratory | Laser Room | RF Testing Laboratory
Thin Film Fabrication & Testing Laboratory | Noise Measurement Room
X-Ray Laboratory | Software

CHEMICAL ROOM
Protector laboratory hood (Labconco Pro)
Econotherm Laboratory Oven, temp +65-210°C
Photoresist Spinner (Headway Research Inc., 1300 WATTS, Model 1025)
Ultra Pure water system (Millipore)
Aligner (Colbit)
Exposure System (Perkin-Elmer 300HT Minalign)

PATTERNING LABORATORY

Thermco MB-80 diffusion furnace with Ana-Lock 321 controller
Reactive ion plasma etcher (March CS 1701)
Aligner (Optical Associates Inc, Hybralign series 400)
Exposure system (Model 87330, Oriel corporation)

LASER ROOM

2 PLD (laser: Lumonics HY1200 & Continuum sinelite)

RF TESTING LABORATORY

2 Cryostations (Janis)
HP85047A Network Analyzer (300 KHz - 6 GHz)
HP8720ES Network Analyzer (up to 20 GHz)
High Voltage Supply, etc...

THIN FILM FABRICATION AND TESTING LABORATORY

Nordiko Sputtering System
Profilometer (Tencor Instrument, Alpha step 100)
Dicing saw (Micro Automation Model 1000-6)
Plasma etcher (LFE Plasma Systems 301- A Mark IV Company)
Microscope (Bausch&Comb, MicroZoom)
Aligner L116A Dual Mode Automatic Ellipsometer (Gaerlner Scientific Corporation)
Hybrid Ball Bonder (Mech-EL Industries Inc NU 827)
Thin Film Stress measurement system (Tencor FLX-2320)
Super Repro (Industrial FotoTECNICA Firenze)
Milling/Drilling Machine
Mini Lathe
Dicing Saw (Tempress Model 602)

NOISE MEASUREMENT ROOM

Noise Chamber (Lingren RF Enclosures)
Cryostations (Janis)
HP3589A Network Analyzer (10Hz - 150MHz)
High Voltage Supply, etc...

X-RAY LABORATORY

X-Ray (Bruker Axs Inc.)

SOFTWARE

Genesys (Eagleware):
Powerful, fast, and accurate software for RF and microwave design engineers. Synthesis, design entry, and simulation software are integrated into a single design environment.

Sonnet Software
Electromagnetic simulation software for design and analysis of high-frequency circuits, distributed filters, transitions, LTCC and multi-layer RF packages, waveguides and antennas.

Zeland IE3D & Fidelity
High-frequency electromagnetic simulation and design tools for microwave, semiconductor, wireless, and telecom applications.

LabVIEW:
Graphical software system for developing high-performance scientific and engineering applications. LabVIEW increases the work productivity in creating test, measurement, and automation solutions through data acquisition, data analysis, and data visualization.

Others software:
Matlab
MathCad
Pspice, etc...


 

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